In collaboration with Hymite GmbH, NanoFocus AG has developed µscan inspection leak, an optical leak tester for MEMS and optoelectronic components directly on the wafer.

The leak tester instrument is based on the optical profilometer µscan combined with a vacuum chamber for helium leak testing. All components on the wafer are tested with the µscan inspection leak. Both small and large deformations of the membranes are measured and analyzed. Compared with other test instruments, the measuring instrument is cost-effective, as well as fast and easy to operate.