Flexibility, universality and ease-of-use were the top design criteria for the µscan explorer surface profilometer. Not all metrology tasks are identical. Some tasks require a large field-of-view, but others require high vertical and lateral resolutions. For some applications a one-off measurement solves the problem, but for others hundred of tests need to be run. The µscan explorer can be adapted to handle any metrology job no matter how big or small, and handle it easily.

A built in real-time video-camera allows simple and fast identification of the area of interest to be measured. On-the-fly sensor changes provide high resolution surface finish information and micro-geometry results is as easy as the measurement process itself, because the µscan explorer's measurement software interfaces seamlessly with NanoFocus' µsoft analysis software.