The 3D profilometer µscan custom has proven itself many times over in the measurement of topography, height profile or layer thickness in production processes. Its modular construction allows adaptation to many different measurement tasks. The NanoFocus software concept means you are up to speed in the shortest time. From fully automatic generation of analysis protocol through to SPC evaluation, you obtain a “press button solution” specially tailored to your application. In addition, with the NanoFocus µscan series you measure up to 100 times faster than with conventional tactile systems. That saves money and reduces costs.

Our application experts select with you the optimal combination of sensors, measurement stage / stand and analysis software.
The optical sensors cover the vertical measuring ranges between 300 µm and 18 mm. The height resolution goes down to 10 nm. A large number of our measurement solutions are applied today as industry standards. Our specialists would be pleased to advise you on your measurement task.

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