Hardness testing procedures are used to investigate the surface hardness and coating characteristics of materials. These so-called nanoimprints can only be recorded and quantified with the use of high-precision measurement technology. With µsurf the required degree of resolution can be attained. The analysis software µsoft control and µsoft analysis provide all the features needed for creating a protocol.

Products: µsurf explorer, µsurf custom, µsoft analysis

Minute quantities of adhesive are used to position GHz chips on the substrate. The wrong quantity can lead to functional impairment and can render the component inoperable. Precise and fast measurement technology is required for monitoring the volumes and geometry of the nanoliter volumes. The µscan optical profilometer facilitates these precise measurements without any problems.

Microlenses can be measured three-dimensionally and non-destructively at various stages of the production process using µsurf technology. To inspect the quality of molding processes, the master and replica are compared and deviations presented quantitatively. The lens geometry is automatically captured in the inspection of the manufactured lens arrays. A target-actual comparison can be performed on the basis of a parametric aspherical function. The stitching function allows complete lens arrays to be acquired.

Star couplers are used as network components for glass fiber networks in communications technology. The investigation of 3D topography with µsurf allows the determination of deviations from the target geometry. NanoFocus µsurf particularly excels through its precise reproduction of steep edges.

In the production of high-pressure sensors by etching, various geometrical parameters (depth, width, layer thickness) and roughness are checked to configure the manufacturing process. µsurf captures the surface roughness, the microgeometry of the struts, as well as the coatings on the metal surfaces - all with just one measurement.

When inspecting sub-micrometer structures in glass, the measuring instrument has to measure reliably and, at the same time, with high resolution - even in the case of weak reflection. To achieve this the µsurf can be adapted to the reflection properties of the material.

High-precision manufactured wafers form the basis for the chip and solar energy industries. In production control, the waviness and roughness of the wafer are measured and analyzed in the finishing process. The typical roughness is a few nanometers.
µsurf technology can record even  such nanometer roughness thanks to its robust construction and high precise measurement technology.

Products: µsurf custom, µsoft analysis