1994

NanoFocus Messtechnik GmbH founded in Duisburg
Basic research and development of high-resolution optical 3D microscopy such as phase microscopy, confocal white light microscopy and 3D analysis software

1997

OM Engineering Optoelektronische Messtechnik GmbH founded
Application development of contactless 3D laser profilometry

1999

Launch of NanoFocus µsurf and OM µscan products

2001

Integration of OM Engineering GmbH into NanoFocus GmbH and change of legal form into NanoFocus AG

2002

Market segmentation and global distribution

2003

New company headquarters: Oberhausen

2004

Winner of “Zukunftswettbewerb Ruhrgebiet” award (future competition award for the Ruhr region of Germany)
Competence centre surface measurement technology founded

2005

NanoFocus Inc. Richmond/USA founded

2006

Growth phase initiated: First significant increase in sales +46%;
Move to new premises at Lindnerstrasse 98 in Oberhausen

2007

International launch of the ‘μsurf explorer’ standard product
Sales agreements with IMSTec GmbH (medical technology) and
Graphische Technik und Handel Heimann GmbH (printing industry)
New standard automation software – ‘µsoft automation’